National Yunlin University of Science and Technology
Regist No
Date
2014-12-15
The invention is a device of swirl jet assisted laser micromachining. The swirl jet can prevent the debris that produced by laser processing on the surface of the target blocking the laser beam. It also can take the debris away from the inside of the nozzle in order to improve the efficiency of the laser processing. The difference between jet assisted and swirl jet assisted is the device of swirl jet assisted laser micromachining is made by four air feeders and eight gas outlet tubes. The air feeders generate a swirl flow, and the gas will be exported from the gas outlet tubes. This mechanism can also bring the particles that generated by laser processing to the inside of the device, and will be exported from the gas outlet tubes. When the particles are transported to the gas outlet tubes, the laser beam continues processing the target. The laser beam will not be blocked by any particles.
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