Device for the transportation of substrates in the vacuum installation
분야
기계/엔진/공구/산업용공정/야금
년도
2014
업체명
National Research Tomsk Polytechnic University
등록번호
Patents ?? RU 143848
등록일
2014-12-15
Device is a mechanism for transportation of substrates in vacuum installations with a multiple vacuum chambers separated by the vacuum valves.
The problem of the transportation of substrates one vacuum chamber to another through the vacuum valves is solved. This makes possible to deposit multilayer coatings in one operating cycle, load substrates without deterioration of vacuum in the main vacuum chamber